In mosfet middle voltage process, may I know the following technology name are same process? because I saw the internal structure are very similar.
Split Gate (SGT)
Trench Field Plate
Shield Gate Trench
I want to know which gate technology belongs to? As far as I know, Infineon is Trench Field Plate. Is this technology the same technology as Split Gate (SGT), Shield Gate Trench on the market, but with a different name?