Hi Guys, we are a small company based in Liverpool Uk and we have recently developed a new gas sensing device – OPTIX for vacuum processes. Its different to RGA’s in that we use a remote plasma light to spectrally sense gases present in a vacuum chamber.
One aspect that is driving its use is its tolerance of volatile chemical vapours, which are problem for standard RGA’s.
We have had very good feedback from a large SiC device maker. However, they won’t release any information from their processes for obvious reasons.
So we are looking for an opportunity to gather some test data and further our knowledge.
You can see some brief details at www.gencoa.com/optix
Hi colleagues !
I can`t find a basictype for IMZA120R015M1H.
We need this for export control classification evidence